Dr. Edward H. Wahl Profile

Dr. Edward H. Wahl

at Picarro Inc

SPIE Involvement:

Author

Publications (5)

Proceedings Article | 14 May 2007 Paper

Real-time trace ambient ammonia monitor for haze prevention

Katsumi Nishimura, Yuhei Sakaguchi, Eric Crosson, Edward Wahl, Chris Rella

Proceedings Volume 6607, 66071Y (2007) https://doi.org/10.1117/12.728981

KEYWORDS: Air contamination, Ions, Semiconductors, Absorption, Photomasks, Lithography, Gases, Chromatography, Optical lithography, Contamination

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Proceedings Article | 20 October 2006 Paper

Real-time ultra-sensitive ambient ammonia monitor for advanced lithography

Eric Crosson, Katsumi Nishimura, Yuhei Sakaguchi, Chris Rella, Edward Wahl

Proceedings Volume 6349, 63492R (2006) https://doi.org/10.1117/12.692934

KEYWORDS: Ions, Lithography, Optical lithography, Semiconductors, Chromatography, Absorption, Semiconducting wafers, Spatial light modulators, FT-IR spectroscopy, Microsoft Foundation Class Library

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Proceedings Article | 29 December 2004 Paper

High-sensitivity detectors based on cavity ring-down spectroscopy

Barbara Paldus, Bernard Fidric, Steve Sanders, Sze Meng Tan, Hoa Pham, Alexander Kachanov, Edward Wahl, Eric Crosson

Proceedings Volume 5617, (2004) https://doi.org/10.1117/12.578374

KEYWORDS: Absorption, Spectroscopy, Sensors, Semiconductor lasers, Light sources, FT-IR spectroscopy, Spectroscopes, Light, Toxic gases, Absorption spectroscopy

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Proceedings Article | 8 July 2004 Paper

Moving solid state cyan lasers beyond 20 mW

Guido Knippels, S. Koulikov, Boris Kharlamov, G. Vacca, Chris Rella, Bruce Richman, Alex Kachanov, Sze Tan, Edward Wahl, H. Pham, Eric Crosson

Proceedings Volume 5332, (2004) https://doi.org/10.1117/12.538043

KEYWORDS: Semiconductor lasers, Laser vision correction, Solid state lasers, Crystals, Resonance enhancement, Laser applications, Solid state physics, Second-harmonic generation, Monochromatic aberrations, Laser marking

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Proceedings Article | 8 July 2004 Paper

Reliability and robustness of the cyan 488-nm laser

Doug Burbidge, Carla Miner, J. Evans, S. Wallace, Peter Cottreau, Edward Wahl, Barbara Paldus

Proceedings Volume 5332, (2004) https://doi.org/10.1117/12.538044

KEYWORDS: Crystals, Reliability, Laser stabilization, Temperature metrology, Second-harmonic generation, Laser crystals, Control systems, Semiconductor lasers, Nonlinear crystals, Lasers

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