Dr. Eileen Clifford Profile

Dr. Eileen Clifford

Adjunct Professor

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Publications (1)

Proceedings Article | 16 July 2002 Paper

Metrology of optical constants for sub-200-nm lithographic films

Michael Anderson, Eileen Clifford

Proceedings Volume 4689, (2002) https://doi.org/10.1117/12.473462

KEYWORDS: Semiconducting wafers, Mass attenuation coefficient, Manufacturing, Error analysis, Metrology, Tolerancing, Absorbance, Statistical analysis, Optical testing, Analytical research

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