Dr. Eitan Rothstein Profile

Dr. Eitan Rothstein

at Nova Ltd

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Publications (2)

Proceedings Article | 27 April 2023 Presentation + Paper

Full wafer OCD metrology: increasing sampling rate without the cost of ownership penalty

Daniel Doutt, Ping-ju Chen, Bhargava Ravoori, Tuyen Tran, Eitan Rothstein, Nir Kampel, Lilach Tamam, Effi Aboody, Avron Ger, Harindra Vedala

Proceedings Volume 12496, 124960B (2023) https://doi.org/10.1117/12.2657471

KEYWORDS: Semiconducting wafers, Etching, Education and training, Chemical mechanical planarization, Metrology, Machine learning, Data modeling, Process control, Time metrology, Visibility

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Proceedings Article | 20 March 2020 Presentation + Paper

Advanced machine learning eco-system to address HVM optical metrology requirements

Padraig Timoney, Roma Luthra, Alex Elia, Haibo Liu, Paul Isbester, Avi Levy, Michael Shifrin, Barak Bringoltz, Eylon Rabinovich, Ariel Broitman, Eitan Rothstein, Ran Yacoby, Ilya Rubinovich, YongHa Kim, Ofer Shlagman, Barak Ben-Nahum, Marina Zolkin, Igor Turovets

Proceedings Volume 11325, 113251H (2020) https://doi.org/10.1117/12.2552058

KEYWORDS: Metrology, Back end of line, Semiconducting wafers, Scatterometry, Machine learning

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