Ms. Eleni Psara Profile

Eleni Psara

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Publications (2)

Proceedings Article | 4 September 2015 Paper

Patterning options for N7 logic: prospects and challenges for EUV

Eelco van Setten, Friso Wittebrood, Eleni Psara, Dorothe Oorschot, Vicky Philipsen

Proceedings Volume 9661, 96610G (2015) https://doi.org/10.1117/12.2196426

KEYWORDS: Extreme ultraviolet, Extreme ultraviolet lithography, Photomasks, Optical lithography, Semiconducting wafers, Logic, Etching, Error analysis, Liquid phase epitaxy, Lithography

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Proceedings Article | 17 October 2014 Paper

Imaging performance and challenges of 10nm and 7nm logic nodes with 0.33 NA EUV

Eelco van Setten, Guido Schiffelers, Eleni Psara, Dorothe Oorschot, Natalia Davydova, Jo Finders, Laurent Depre, Vincent Farys

Proceedings Volume 9231, 923108 (2014) https://doi.org/10.1117/12.2065945

KEYWORDS: Logic, Optical proximity correction, Photomasks, Extreme ultraviolet, Semiconducting wafers, Optical lithography, Calibration, Extreme ultraviolet lithography, Critical dimension metrology, Image resolution

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