Dr. Emmanuel Dupuy
at imec
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11329, Advanced Etch Technology for Nanopatterning IX
KEYWORDS: Etching, Optical lithography, Silicon, Fin field effect transistors, Front end of line, Dry etching, Field effect transistors, Gallium arsenide, Plasma etching, Nanowires

Proceedings Article | 17 March 2015 Paper
Proc. SPIE. 9428, Advanced Etch Technology for Nanopatterning IV
KEYWORDS: Line edge roughness, Line width roughness, Plasma, Etching, Critical dimension metrology, Plasma etching, Silicon, Oxygen, Photoresist processing, Neodymium

Proceedings Article | 28 May 2013 Paper
Proc. SPIE. 8749, Quantum Information and Computation XI
KEYWORDS: Surface plasmons, Mirrors, Quantum information, Quantum efficiency, Gaussian beams, Interfaces, Metals, Semiconductors, Nanowires, Photonic nanostructures

Proceedings Article | 14 March 2013 Paper
Proc. SPIE. 8619, Physics and Simulation of Optoelectronic Devices XXI
KEYWORDS: Quantum dots, Gaussian beams, Surface plasmons, Mirrors, Quantum efficiency, Interfaces, Semiconductors, Gallium arsenide, Nanowires, Photonic nanostructures

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