Dr. Emmanuel P. Quevy Profile

Dr. Emmanuel P. Quevy

at Univ of Califonia Berkeley

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Author

Publications (5)

Proceedings Article | 29 December 2004 Paper

Integrated poly-SiGe nanomechanical resonators for wireless sensor nodes

Emmanuel Quevy, Tsu-Jae King, Roger Howe

Proceedings Volume 5593, (2004) https://doi.org/10.1117/12.573034

KEYWORDS: Resonators, Transducers, Sensors, Germanium, Electrodes, Oscillators, Solar energy, Microelectromechanical systems, Nonlinear filtering, Aluminum nitride

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Proceedings Article | 2 October 2001 Paper

Reliability of self-assembled 3D microstructures: dynamic snap-through modeling and experimental validation

Olivier Millet, Lionel Buchaillot, Emmanuel Quevy, Dominique Collard

Proceedings Volume 4558, (2001) https://doi.org/10.1117/12.442991

KEYWORDS: Reliability, Structural health monitoring, Actuators, 3D microstructuring, 3D modeling, Microfabrication, Microelectromechanical systems, Semiconducting wafers, Low pressure chemical vapor deposition, Photodiodes

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Proceedings Article | 30 April 2001 Paper

New actuation structure for the deformation of continuous mirrors for adaptive optics

Emmanuel Quevy, Lionel Buchaillot, Dominique Collard

Proceedings Volume 4407, (2001) https://doi.org/10.1117/12.425306

KEYWORDS: Mirrors, Actuators, Adaptive optics, Electrodes, Silicon, Semiconducting wafers, Gold, Beam shaping, Translucency, Silicon films

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Proceedings Article | 5 April 2001 Paper

Reliability of self-assembled 3D microstructures: snap-through modeling and experimental validation

Olivier Millet, Lionel Buchaillot, Emmanuel Quevy, Dominique Collard

Proceedings Volume 4408, (2001) https://doi.org/10.1117/12.425355

KEYWORDS: Structural health monitoring, Reliability, 3D microstructuring, Microfabrication, Semiconducting wafers, Actuators, Numerical integration, Atrial fibrillation, Photodiodes, Modeling

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Proceedings Article | 5 April 2001 Paper

Stiction-controlled locking system for three-dimensional self-assembled microstructures: theory and experimental validation

Vincent Agache, Lionel Buchaillot, Emmanuel Quevy, Dominique Collard

Proceedings Volume 4408, (2001) https://doi.org/10.1117/12.425345

KEYWORDS: Actuators, Capillaries, 3D modeling, 3D microstructuring, Chemical species, Liquids, Molecules, Dielectrics, Signal processing, Microelectromechanical systems

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