Emmanuelle Veran
at Alcatel Vacuum Technology
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 27 May 2009 Paper
Proc. SPIE. 7470, 25th European Mask and Lithography Conference
KEYWORDS: Contamination, Dry etching, Crystals, Ions, Manufacturing, Pellicles, Photomasks, Semiconducting wafers, Scanning tunneling microscopy, Vacuum purge

Proceedings Article | 13 September 2002 Paper
Proc. SPIE. 4760, High-Power Laser Ablation IV
KEYWORDS: Lithography, High power lasers, Laser applications, Laser development, Xenon, Extreme ultraviolet, Extreme ultraviolet lithography, Prototyping, Plasma, Laser systems engineering

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