Prof. Enakshi Bhattacharya Profile

Prof. Enakshi Bhattacharya

Professor at IIT Madras

SPIE Involvement:

Author

Proceedings Article | 12 March 2024 Poster + Paper

Design and fabrication of an electrothermally actuated 2D scanning micromirror

Sreeraj Nambiar, Susan Thomas, Shanti Bhattacharya, Enakshi Bhattacharya

Proceedings Volume 12899, 128990P (2024) https://doi.org/10.1117/12.3000919

KEYWORDS: Micromirrors, Design, Mirrors, Fabrication, Silicon, Oxides, Aluminum, Semiconducting wafers, Mirror surfaces, Finite element methods

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Proceedings Article | 18 February 2010 Paper

Design and fabrication of a micro-mirror for spectroscopy

K. Ajay Giri Prakash, Sanjay Dhabai, Enakshi Bhattacharya, Shanti Bhattacharya

Proceedings Volume 7594, 75940X (2010) https://doi.org/10.1117/12.840994

KEYWORDS: Mirrors, Micromirrors, Fourier transforms, Semiconducting wafers, Interferometers, Spectroscopy, Wafer bonding, Microelectromechanical systems, Photomasks, Oxides

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Proceedings Article | 5 February 2010 Paper

Mitigating the irreversible deformation with pressure in silicon/porous silicon composite membranes

L. Sujatha, Rahul Goswami, Enakshi Bhattacharya

Proceedings Volume 7592, 75920W (2010) https://doi.org/10.1117/12.846480

KEYWORDS: Composites, Silicon, Coating, Picosecond phenomena, Sensors, Self-assembled monolayers, Microelectromechanical systems, Etching, Electrochemical etching, Reliability

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Proceedings Article | 5 February 2010 Paper

Packaged bulk micromachined triglyceride biosensor

S. Mohanasundaram, S. Mercy, P. Harikrishna, Kailash Rani, Enakshi Bhattacharya, Anju Chadha

Proceedings Volume 7592, 75920G (2010) https://doi.org/10.1117/12.846477

KEYWORDS: Sensors, Silicon, Biosensors, Semiconducting wafers, Glasses, Packaging, Gold, Adhesives, Dielectrics, Oxides

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SPIE Journal Paper | 1 July 2009

Critical study of high-sensitivity pressure sensors with silicon/porous silicon composite membranes

L. Sujatha, Vishwas Kale, Enakshi Bhattacharya

JM3, Vol. 8, Issue 03, 033070, (July 2009) https://doi.org/10.1117/12.10.1117/1.3213252

KEYWORDS: Composites, Sensors, Picosecond phenomena, Silicon, Humidity, Crystals, Semiconducting wafers, Microelectromechanical systems, Scanning electron microscopy, Metals

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SPIE Journal Paper | 1 July 2009

Extraction of residual stress and dimensions from electrical measurements on surface micromachined test structures

Somashekara Bhat, Enakshi Bhattacharya

JM3, Vol. 8, Issue 03, 031309, (July 2009) https://doi.org/10.1117/12.10.1117/1.3167825

KEYWORDS: Resistors, Resistance, Oxides, Etching, Surface micromachining, Thin films, Reactive ion etching, Microelectronics, Wet etching, Profilometers

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Proceedings Article | 26 February 2008 Paper

Sensitivity and stress effects of composite membranes with micro/macro porous silicon for pressure sensor applications

L. Sujatha, Enakshi Bhattacharya

Proceedings Volume 6882, 68820H (2008) https://doi.org/10.1117/12.762868

KEYWORDS: Composites, Silicon, Picosecond phenomena, Sensors, Crystals, Microelectromechanical systems, Scanning electron microscopy, Profilometers, Metals, Semiconducting wafers

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Proceedings Article | 18 February 2008 Paper

Electrical measurement of undercut in surface micromachining

Somashekara Bhat, Enakshi Bhattacharya

Proceedings Volume 6884, 68840R (2008) https://doi.org/10.1117/12.764417

KEYWORDS: Resistors, Resistance, Etching, Oxides, Metals, Surface micromachining, Wet etching, Photoresist materials, Aluminum, Dry etching

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SPIE Journal Paper | 1 October 2007

Parameter extraction from simple electrical measurements on surface micromachined cantilevers

Somashekara Bhat, Enakshi Bhattacharya

JM3, Vol. 6, Issue 04, 043013, (October 2007) https://doi.org/10.1117/12.10.1117/1.2794291

KEYWORDS: Etching, Microelectromechanical systems, Aluminum, Oxides, Profilometers, Reactive ion etching, Scanning electron microscopy, Sensors, Optical testing, Plasma

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Proceedings Article | 12 February 2007 Paper

Silicon/porous silicon composite membrane for high-sensitivity pressure sensor

L. Sujatha, Enakshi Bhattacharya

Proceedings Volume 6464, 64640O (2007) https://doi.org/10.1117/12.698278

KEYWORDS: Picosecond phenomena, Silicon, Composites, Sensors, Resistors, Crystals, Photomasks, Oxides, Semiconducting wafers, Etching

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Proceedings Article | 19 January 2007 Paper

Simple measurement technique for resonance frequency of micromachined cantilevers

Somashekara Bhat, Enakshi Bhattacharya

Proceedings Volume 6463, 64630N (2007) https://doi.org/10.1117/12.698280

KEYWORDS: Aluminum, Oxides, Optical testing, Microelectromechanical systems, Profilometers, Etching, Optical simulations, Measurement devices, Doppler effect, Scanning electron microscopy

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Proceedings Article | 6 January 2006 Paper

Stiction force estimation from attachment length and electrostatic measurements on cantilever beams

Enakshi Bhattacharya, Souvik Basu, Anil Prabhakar

Proceedings Volume 6111, 611101 (2006) https://doi.org/10.1117/12.640506

KEYWORDS: Liquids, Optical simulations, Surface roughness, Silicon, Oxides, Surface micromachining, Capillaries, Hydrogen, Etching, Adhesives

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Proceedings Article | 14 October 2003 Paper

Polysilicon piezoresistive pressure sensor using silicon-on-insulator (SOI) approach

Kunchinadka Narayana Bhat, Enakshi Bhattacharya, Amitava DasGupta, Nandita DasGupta, Bhimanadhuni KotiReddy, Parimi Rao, Krishnan Balasubramaniam

Proceedings Volume 5062, (2003) https://doi.org/10.1117/12.514725

KEYWORDS: Resistors, Sensors, Silicon, Resistance, Etching, Wheatstone bridges, Doping, Semiconducting wafers, Temperature metrology, Boron

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Proceedings Article | 14 October 2003 Paper

Contact angle measurements on polysilicon for surface micromachining applications

Enakshi Bhattacharya, U. Venu Babu, L. Helen Anitha Rani, P. Pradeep, Parimi Rao, Kunchinadka Bhat

Proceedings Volume 5062, (2003) https://doi.org/10.1117/12.514520

KEYWORDS: Oxides, Coating, Diffusion, Etching, Silicon, Surface roughness, Surface micromachining, Low pressure chemical vapor deposition, Doping, Crystals

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Proceedings Article | 21 November 2001 Paper

Three-terminal test structure to measure stiction force using I-V data

Enakshi Bhattacharya, Jinbo Kuang, Michael Judy, Jack Martin

Proceedings Volume 4592, (2001) https://doi.org/10.1117/12.448974

KEYWORDS: Actuators, Semiconducting wafers, Microelectromechanical systems, Scanning electron microscopy, Finite element methods, Visualization, Packaging, Analog electronics, Wafer-level optics, Calibration

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Showing 5 of 15 publications

Conference Committee Involvement (6)

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X

24 January 2011 | San Francisco, California, United States

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX

25 January 2010 | San Francisco, California, United States

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices VIII

28 January 2009 | San Jose, California, United States

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII

21 January 2008 | San Jose, California, United States

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI

23 January 2007 | San Jose, California, United States

Showing 5 of 6 Conference Committees

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