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Eran Socher
at Technion-Israel Inst Tech
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Publications (1)
Proceedings Article | 23 January 2003 Paper
Modeling, design, and fabrication of uncooled IR CMOS compatible thermoelectric sensors
Eran Socher, Yehuda Sinai, Ofir Bochobza-Degani, Yael Nemirovsky
Proceedings Volume 4820, (2003) https://doi.org/10.1117/12.468669
KEYWORDS: Sensors, CMOS sensors, Thermoelectric materials, Micromachining, Etching, Thermal modeling, Resistance, Silicon, CMOS technology, Standards development
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