Dr. Erdem Yarar Profile

Dr. Erdem Yarar

at Fraunhofer-ISIT

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Author

Publications (3)

Proceedings Article | 12 March 2024 Presentation + Paper

Low-power multi-scan patterns capable 3D-constructed piezoelectric MEMS mirrors

J.-Y. Hwang, E. Yarar, L. Wysocki, F. Röhr, G. Wille, S. Gu-Stoppel

Proceedings Volume 12899, 128990E (2024) https://doi.org/10.1117/12.2692907

KEYWORDS: Mirrors, Microelectromechanical systems, Aluminum scandium nitride, Aluminum nitride, Piezoelectric materials, Laser scanners, Optical scanning systems

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Proceedings Article | 12 March 2024 Presentation + Paper

Biaxial resonant MEMS mirrors with large field of view for LiDAR systems

L. Wysocki, J.-Y. Hwang, P. Schütt, P. Raschdorf, E. Yarar, G. Wille, S. Gu-Stoppel

Proceedings Volume 12899, 128990H (2024) https://doi.org/10.1117/12.3002711

KEYWORDS: Mirrors, Design, Microelectromechanical systems, LIDAR, Silicon, Actuators, Semiconducting wafers, Robots

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Proceedings Article | 5 March 2021 Presentation + Paper

A design and manufacturing platform for AlScN based highly linear quasi-static MEMS mirrors with large optical apertures

S. Gu-Stoppel, F. Senger, L. Wen, E. Yarar, G. Wille, J. Albers

Proceedings Volume 11697, 116970F (2021) https://doi.org/10.1117/12.2583399

KEYWORDS: Optics manufacturing, Mirrors, Microelectromechanical systems, Design for manufacturability, Glasses, Actuators, Semiconducting wafers, Particles, Humidity

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