Mr. Eric C. Benck Profile

Eric C. Benck

Physicist at National Institute of Standards and Technology

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Publications (2)

Proceedings Article | 16 March 2009 Paper

Birefringence issues with uniaxial crystals as last lens elements for high-index immersion lithography

John Burnett, Eric Benck, Simon Kaplan, Gabriel Sirat, Chris Mack

Proceedings Volume 7274, 727421 (2009) https://doi.org/10.1117/12.814324

KEYWORDS: Sapphire, Crystals, Birefringence, Polarization, Lithography, Absorption, Anisotropy, Immersion lithography, Lithographic illumination, Double patterning technology

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Proceedings Article | 10 August 1994 Paper

Cavity-enhanced spectroscopies: photothermal, photovaporization, and capillary waves

Hans Schuessler, Eric Benck, A. Kolemenskii

Proceedings Volume 2097, (1994) https://doi.org/10.1117/12.183147

KEYWORDS: Spectroscopy, Capillaries, Laser beam diagnostics, Optical resonators, Resonators, Liquids, Laser applications, Absorption, Interference (communication), Refraction

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