Dr. Eric M. Gullikson
Staff Scientist at Lawrence Berkeley National Lab
SPIE Involvement:
Publications (140)

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11323, Extreme Ultraviolet (EUV) Lithography XI
KEYWORDS: Mirrors, Image processing, Scanners, Scanning electron microscopy, Projection systems, Vibration isolation, Semiconducting wafers, Camera shutters

Proceedings Article | 26 March 2019 Presentation + Paper
Proc. SPIE. 10957, Extreme Ultraviolet (EUV) Lithography X
KEYWORDS: Monochromatic aberrations, Optical lithography, Image processing, Scanning electron microscopy, Photoresist materials, Projection systems, Line width roughness, Extreme ultraviolet lithography, Critical dimension metrology, Semiconducting wafers

Proceedings Article | 6 July 2018 Paper
Proc. SPIE. 10699, Space Telescopes and Instrumentation 2018: Ultraviolet to Gamma Ray
KEYWORDS: Diffraction, Optical design, Spectroscopy, X-rays, Silicon, Charge-coupled devices, Optical alignment, X-ray technology, Diffraction gratings

Proceedings Article | 16 October 2017 Presentation
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Optical components, Electron beam lithography, Optical design, Reflection, Silicon, Atomic layer deposition, Extreme ultraviolet, Molybdenum, Structural engineering, Phase shifts

Proceedings Article | 29 August 2017 Presentation + Paper
Proc. SPIE. 10399, Optics for EUV, X-Ray, and Gamma-Ray Astronomy VIII
KEYWORDS: Reflectors, Mirrors, Rockets, Modulation, Polarization, Spectroscopy, X-rays, X-ray sources, Phase shift keying, Polarimetry

Showing 5 of 140 publications
Conference Committee Involvement (2)
Optical Constants of Materials for UV to X-Ray Wavelengths
4 August 2004 | Denver, Colorado, United States
Advances in Computational Methods for X-Ray and Neutron Optics
3 August 2004 | Denver, Colorado, United States
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top