Eric Kwon
at KLA Corp
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 3 October 2018 Paper
Gregg Inderhees, Bill Kalsbeck, Alexander Tan, Paul Chung, JiUk Hur, Eric Kwon, Min Choo, Wonil Cho, Chan-Uk Jeon, IlYong Jang, In-Yong Kang, JeongHun Seo, Suein Son
Proceedings Volume 10810, 1081017 (2018) https://doi.org/10.1117/12.2511160
KEYWORDS: Inspection, Extreme ultraviolet, Photomasks, Reticles, Yield improvement, Coating, Optical lithography, Extreme ultraviolet lithography

Proceedings Article | 23 October 2015 Paper
K. D. Roeth, W. Choi, Y. Lee, S. Kim, D. Yim, F. Laske, M. Ferber, M. Daneshpanah, E. Kwon
Proceedings Volume 9635, 963506 (2015) https://doi.org/10.1117/12.2202818
KEYWORDS: Photomasks, Overlay metrology, Reticles, Semiconducting wafers, Metrology, Image registration, Manufacturing, Ions, Scanners, Error analysis

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