Dr. Eric Teboul Profile

Dr. Eric Teboul

Director of Optical Spectroscopy Division at HORIBA Scientific

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Author

Publications (3)

Proceedings Article | 10 June 2010 Paper

Complementing and adding to SEM performance with the addition of XRF, Raman, CL and PL spectroscopy and imaging

E. Leroy, S. Mamedov, E. Teboul, A. Whitley, D. Meyer, L. Casson

Proceedings Volume 7729, 77290R (2010) https://doi.org/10.1117/12.864236

KEYWORDS: Scanning electron microscopy, Raman spectroscopy, Imaging spectroscopy, Luminescence, Spectroscopy, Electron beams, Semiconductors, Minerals, Crystals, Mirrors

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Proceedings Article | 18 June 2004 Paper

Measurement of organic/polymer material by phase modulation ellipsometry

Yong Ji, Eric Teboul, Alan Kramer

Proceedings Volume 5351, (2004) https://doi.org/10.1117/12.529365

KEYWORDS: Glasses, Polymers, Thin films, Liquid crystals, Refractive index, Phase modulation, Optical properties, Ellipsometry, Polymer thin films, Doping

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Proceedings Article | 23 December 2003 Paper

A new sensor for trench depth monitoring: the TDM 200

Pascal Amary, Denis Cattelan, Jean-Paul Gaston, Bernard Kaplan, Eric Teboul

Proceedings Volume 5343, (2003) https://doi.org/10.1117/12.529023

KEYWORDS: Etching, Time division multiplexing, Silicon, Signal processing, Sensors, Interferometers, Phase shifts, Polarimetry, Prisms, Polarization

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