Dr. Erik N. Hoggan Profile

Dr. Erik N. Hoggan

at Intel Corp

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Author

Publications (3)

Proceedings Article | 24 July 2002 Paper

Designing photoresist systems for CO2-based microlithography

Devin Flowers, Erik Hoggan, Ruben Carbonell, Joseph DeSimone

Proceedings Volume 4690, (2002) https://doi.org/10.1117/12.474240

KEYWORDS: Carbon monoxide, Polymers, Optical lithography, Semiconducting wafers, Photoresist materials, Liquids, Semiconductors, Lithography, Coating, Thin film coatings

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Proceedings Article | 24 July 2002 Paper

Spin coating and photolithography using liquid and supercritical carbon dioxide

Erik Hoggan, Devin Flowers, Joseph DeSimone, Ruben Carbonell

Proceedings Volume 4690, (2002) https://doi.org/10.1117/12.474199

KEYWORDS: Carbon monoxide, Lithography, Liquids, Coating, Photoresist materials, Polymers, Semiconducting wafers, Optical lithography, Photoresist developing, Semiconductors

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Proceedings Article | 24 August 2001 Paper

All Co2-processed 157-nm fluoropolymer-containing photoresist systems

Christopher McAdams, Devin Flowers, Erik Hoggan, Ruben Carbonell, Joseph DeSimone

Proceedings Volume 4345, (2001) https://doi.org/10.1117/12.436835

KEYWORDS: Carbon monoxide, Polymers, Liquids, Photoresist materials, Semiconducting wafers, Thin films, Lithography, Chemistry, Photoresist developing, Etching

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