Dr. Erik J. Nelson
at LLNL
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | 1 April 2006
Sasa Bajt, Zu Rong Dai, Erik Nelson, Mark Wall, Jennifer Alameda, Nhan Nguyen, Sherry Baker, Jeffrey Robinson, John Taylor, Andrew Aquila, Nora Edwards
JM3, Vol. 5, Issue 02, 023004, (April 2006) https://doi.org/10.1117/12.10.1117/1.2201027
KEYWORDS: Ruthenium, Silicon, Molybdenum, Extreme ultraviolet lithography, Reflectivity, Electrons, Oxides, Resistance, Transmission electron microscopy, Oxidation

Proceedings Article | 6 May 2005 Paper
Sasa Bajt, Zu Rong Dai, Erik Nelson, Mark Wall, Jennifer Alameda, Nhan Nguyen, Sherry Baker, Jeffrey Robinson, John Taylor, Miles Clift, Andy Aquila, Eric Gullikson, N. V. Ginger Edwards
Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.597443
KEYWORDS: Ruthenium, Reflectivity, Silicon, Multilayers, Oxides, Electron beams, Resistance, Molybdenum, Extreme ultraviolet lithography, Oxidation

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