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Essam Mohamed
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Publications (1)
Proceedings Article | 22 February 2021 Presentation + Paper
Virtual metrology: how to build the bridge between the different data sources
Proceedings Volume 11611, 116112D (2021) https://doi.org/10.1117/12.2588467
KEYWORDS: Metrology, Bridges, Manufacturing, Data modeling, Time metrology, Semiconducting wafers, Reticles, Internet, Design for manufacturability, Data integration
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