Mr. Ethan Wang Profile

Ethan Wang

at Cadence Taiwan, Inc.

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 26 May 2022 Poster + Paper

Using pattern analysis to improve wafer inspection flow

Hung-yu Lin, Ethan Wang, Jason Sweis, Philippe Hurat, Ya-Chieh Lai, Yu-Chin Pai, Ku Fang, Chin-Juan Li, Chia Wei Huang, Jun-Ming Chen, Yung-Feng Cheng

Proceedings Volume 12053, 120531T (2022) https://doi.org/10.1117/12.2613620

KEYWORDS: Inspection, Semiconducting wafers, Wafer inspection, Image classification, Yield improvement, Defect inspection, Data analysis, Software development, Defect detection, Tolerancing

Read Abstract +

Proceedings Article | 23 March 2020 Paper

Early detection of Cu pooling with advanced CMP modeling

Single Hsu, Ethan Wang, Eason Lin, Tamba Gbondo-Tugbawa, Aaron Gower-Hall, Brian Lee, Jansen Chee, Ya-Chieh Lai

Proceedings Volume 11328, 1132816 (2020) https://doi.org/10.1117/12.2551253

KEYWORDS: Chemical mechanical planarization, Copper, Metals, Systems modeling, Data modeling, Oxides, Calibration, Performance modeling, Back end of line, Process modeling

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years