Dr. Etienne Quesnel
at CEA-LETI
SPIE Involvement:
Author
Publications (20)

Proceedings Article | 3 April 2018 Paper
Proc. SPIE. 10570, International Conference on Space Optics — ICSO 1997
KEYWORDS: Lanthanum, Cerium, Detector development, Satellites, Reflection, Astronomical imaging, Optical design, Optical filters, Silica, Ions

Proceedings Article | 23 March 2006 Paper
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Phase shifts, Etching, Reflectivity, Multilayers, Photomasks, Interferometers, Extreme ultraviolet, Extreme ultraviolet lithography, Silicon, Silica

Proceedings Article | 5 October 2005 Paper
Proc. SPIE. 5963, Advances in Optical Thin Films II
KEYWORDS: Silicon, Molybdenum, Annealing, Interfaces, Mirrors, Transmission electron microscopy, Crystals, Extreme ultraviolet, Temperature metrology, Coating

Proceedings Article | 5 October 2005 Paper
Proc. SPIE. 5963, Advances in Optical Thin Films II
KEYWORDS: Mirrors, Reflectivity, Absorption, Optical coatings, Vacuum ultraviolet, Free electron lasers, Fluorine, Transmittance, Multilayers, Sputter deposition

Proceedings Article | 6 May 2005 Paper
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Mirrors, Silicon, Extreme ultraviolet, Light scattering, Defect detection, Particles, Deposition processes, Photomasks, Cameras, Glasses

Showing 5 of 20 publications
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