We designed the laboratory automation for the ferroelectric thin films investigation, which differs from analogous by open architecture. This equipment is quite adopted with hardware and software of the leading companies (e.g., GPIB boards and LabView National Instruments) in the field of measuring technique and systems of data acquisition. It makes possible to carry out measuring of basic characteristics of ferroelectrics: studying the ferroelectric hysteresis, determining pyroelectric coefficient by static and quasy-static techniques, taking magnitude of remanent polarization, measuring dielectric constants, measuring the specimen electrical conductance. The measuring system has open architecture and it is easy to readjust it to solve specific problems including applications, for example, optimization of technological processes of ferroelectric films fabrication for memory devices or uncooled focal plane arrays. Basing on this measuring system there were developed several methods which give an opportunity to improve the comprehension of processes in ferroelectric systems from physical point of view.
The technological methods proposed above allow one to prepare integrated structures of multi-element heat detectors and special CCD. In thin structure the sensitive film is isolated from the substrate by means of a supporting membrane or serves as the membrane itself. Such a technology seems to be advantageous in further development of different MEMS structures. There is created a completely monolithic pyroelectric array of sensors 100 X 100 micrometers 2 based on a heat-sensitive film construction lifted slightly above the crystal and also detector specimens with NETD less than 0.2 - 0.5 K (8 - 12 micrometers at 300 K and 20 - 50 Hz of modulation frequency). Derived measurements and investigations allowed us to choose the structure of 2D analogue CCD processor which now is under design and which will be integrated with pyroelectric membrane array.
Technologies enabling low-dissipation designs for uncooled array IR sensors are offered. The technique involves the etching of special buffer layers from under a 1-micrometers membrane followed by deposition of an IR-sensitive film and electrode structure. The electrical and physical properties of plumbum-zirconate-titanate, barium titanate, tetraaminodiphenyl, polyvinylidene fluoride pyroelectric films are compared. A circuit for sensing pyroelectric signals in a CCD is considered.
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