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Eungman Lee
at Yonsei Univ
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Author
Publications (4)
Proceedings Article | 4 December 2008 Paper
Calculation of three-dimensional profiles of photoresist exposed by localized electric fields of high-transmission metal nano-apertures
Proceedings Volume 7140, 71401J (2008) https://doi.org/10.1117/12.805399
KEYWORDS: Photoresist materials, Finite-difference time-domain method, Lithography, 3D modeling, Metals, Plasmonics, Optical lithography, Visualization, Aluminum, Surface plasmon polaritons
Proceedings Article | 21 March 2008 Paper
Nano patterning with a single high-transmission nano-metal aperture system
Proceedings Volume 6921, 69212C (2008) https://doi.org/10.1117/12.774485
KEYWORDS: Metals, Lithography, Optical lithography, Near field optics, Aluminum, Near field, Light sources, Objectives, Microscopes, Solids
Proceedings Article | 21 March 2007 Paper
Spectrally investigated optimization for high optical transmission of the C-shaped nano apertures
Proceedings Volume 6517, 651721 (2007) https://doi.org/10.1117/12.712518
KEYWORDS: Metals, Near field, Aluminum, Silver, Near field optics, Transmittance, Finite-difference time-domain method, Light wave propagation, Optical lithography, Laser applications
Proceedings Article | 15 March 2007 Paper
Design of metal slits for higher harmonic fringe patterns generated with surface plasmon interference lithography
Proceedings Volume 6517, 651722 (2007) https://doi.org/10.1117/12.712522
KEYWORDS: Aluminum, Surface plasmons, Polymethylmethacrylate, Metals, Lithography, Photomasks, Fringe analysis, Photoresist materials, Light wave propagation, Finite-difference time-domain method
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