Dr. Eunice L.M. Cheung Profile

Dr. Eunice L.M. Cheung

at Stanford Univ

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Publications (1)

Proceedings Article | 1 May 1997 Paper

Demonstration of a nanolithographic system using a self-assembled monolayer resist for neutral atomic cesium

Rebecca Younkin, Karl Berggren, Eunice Cheung, Kent Johnson, Mara Goff Prentiss, Andrew Black, George Whitesides, D. Ralph, Charles Black, Michael Tinkham

Proceedings Volume 2995, (1997) https://doi.org/10.1117/12.273747

KEYWORDS: Cesium, Self-assembled monolayers, Gold, Silicon, Chemical species, Etching, Photomasks, Silica, Lithography, Optical lithography

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