Dr. Evan M. Anderson
at Sandia National Labs
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | 6 March 2021
JM3 Vol. 20 Issue 01

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11324, Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020
KEYWORDS: Lithography, Optical lithography, Silicon, Hydrogen, Manufacturing, Phosphorus, Pulsed laser operation, Scanning tunneling microscopy, Absorption

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