Dr. Evgeny N. Zhikharev Profile

Dr. Evgeny N. Zhikharev

at Institute of Physics and Technology

SPIE Involvement:

Author

Publications (6)

Proceedings Article | 15 March 2019 Paper

Simulation of dry e-beam etching of resist and experimental evidence

A. Rogozhin, F. Sidorov, M. Bruk, E. Zhikharev

Proceedings Volume 11022, 110221O (2019) https://doi.org/10.1117/12.2522458

KEYWORDS: Electron beam lithography, Polymethylmethacrylate, Dry etching, Monte Carlo methods, Scattering, Chemical species, Ionization, Polymers

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Proceedings Article | 18 December 2014 Paper

Some peculiarities of the new method of a relief creating by the direct electron-beam etching of resist

M. Bruk, E. Zhikharev, D. Streltsov, V. Kalnov, A. Spirin, A. Rogozhin

Proceedings Volume 9440, 94400J (2014) https://doi.org/10.1117/12.2179993

KEYWORDS: Etching, Polymethylmethacrylate, Scanning electron microscopy, Photoresist processing, Diffusion, Electron beams, Image acquisition, Nanostructures, Surface roughness, Polymers

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Proceedings Article | 24 March 2009 Paper

Measurement of dimensions of resist mask elements below 100 nm with help of a scanning electron microscope

V. Gavrilenko, V. Kalnov, Yu. Novikov, A. Orlikovsky, A. Rakov, P. Todua, K. Valiev, E. Zhikharev

Proceedings Volume 7272, 727227 (2009) https://doi.org/10.1117/12.814062

KEYWORDS: Scanning electron microscopy, Silicon, Photomasks, Electron microscopes, Integrated circuits, Nanostructures, Electron beams, Etching, Sensors, Atomic force microscopy

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