Dr. Fan Yang
at Institute of Optics and Electronics
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 6 February 2019 Paper
Proc. SPIE. 10842, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subdiffraction-limited Plasmonic Lithography and Innovative Manufacturing Technology
KEYWORDS: Lithography, Electron beam lithography, Modulation, Polarization, Etching, Laser applications, Laser development, Wavefronts, Phase shift keying, Optics manufacturing

Proceedings Article | 30 January 2019 Paper
Proc. SPIE. 10841, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Meta-Surface-Wave and Planar Optics
KEYWORDS: 3D acquisition, Digital image processing, Imaging systems, Cameras, Sensors, Calibration, Image processing, Optical testing, 3D metrology, 3D image processing

Proceedings Article | 25 October 2016 Paper
Proc. SPIE. 9685, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials
KEYWORDS: Stepper motor drivers, Lithography, Clocks, Control systems, Telecommunications, Process control, Photomasks, Data communications, Semiconducting wafers, Camera shutters

Proceedings Article | 9 June 2006 Paper
Proc. SPIE. 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
KEYWORDS: Thin films, Point spread functions, Mirrors, Optical design, Polarization, Reflection, Optical coatings, Laser optics, Dielectric polarization, Laser systems engineering

Proceedings Article | 8 June 2006 Paper
Proc. SPIE. 6018, 5th International Workshop on Adaptive Optics for Industry and Medicine

Showing 5 of 6 publications
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