Dr. Frank Chen
at Photronics DNP Mask Corp
SPIE Involvement:
Author
Publications (21)

SPIE Journal Paper | 1 May 2007 Open Access
OE, Vol. 46, Issue 05, 051001, (May 2007) https://doi.org/10.1117/12.10.1117/1.2737058

Proceedings Article | 7 March 2006 Paper
Mitchell Marchi, Fang Chen, Pat Harwood, R. Linder, Gordon Brown
Proceedings Volume 4101, (2006) https://doi.org/10.1117/12.498401
KEYWORDS: Holographic interferometry, Holography, Holograms, Laser imaging, Aluminum, Fringe analysis, Prototyping, Assembly equipment, Fabrication, Mirrors

SPIE Journal Paper | 1 May 2003
Fang Chen, Gordon Brown, M. Marchi, Martin Dale
OE, Vol. 42, Issue 05, (May 2003) https://doi.org/10.1117/12.10.1117/1.1566006
KEYWORDS: Pulsed laser operation, Fringe analysis, Holographic interferometry, Laser interferometry, Speckle pattern, Optical engineering, Laser metrology, Laser applications, Interferometry, High speed cameras


Proceedings Article | 1 August 2002 Paper
Nicole Cheng, Clyde Su, Frank Chen, Bill Cheng, Darren Taylor
Proceedings Volume 4754, (2002) https://doi.org/10.1117/12.476965
KEYWORDS: Inspection, Manufacturing, Reticles, Photomasks, Chromium, Optical proximity correction, Metrology, Mask making, Defect inspection, Optical resolution

Showing 5 of 21 publications
Proceedings Volume Editor (1)

Conference Committee Involvement (3)
Optical Measurement and Nondestructive Testing: Techniques and Applications
8 November 2000 | Beijing, China
Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments
8 November 2000 | Beijing, China
Laser Interferometry X: Applications
2 August 2000 | San Diego, CA, United States
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