Dr. Frank Chen
at Photronics DNP Semiconductor Mask Corp
SPIE Involvement:
Publications (21)

SPIE Journal Paper | 1 May 2007
OE Vol. 46 Issue 05

Proceedings Article | 7 March 2006 Paper
Proc. SPIE. 4101, Laser Interferometry X: Techniques and Analysis
KEYWORDS: Fabrication, Mirrors, Fringe analysis, Holograms, Holography, Aluminum, Holographic interferometry, Laser imaging, Assembly equipment, Prototyping

SPIE Journal Paper | 1 May 2003
OE Vol. 42 Issue 05
KEYWORDS: Pulsed laser operation, Fringe analysis, Holographic interferometry, Laser interferometry, Speckle pattern, Optical engineering, Laser metrology, Laser applications, Interferometry, High speed cameras

Proceedings Article | 1 August 2002 Paper
Proc. SPIE. 4754, Photomask and Next-Generation Lithography Mask Technology IX
KEYWORDS: Reticles, Metrology, Manufacturing, Inspection, Chromium, Optical resolution, Photomasks, Optical proximity correction, Mask making, Defect inspection

Showing 5 of 21 publications
Proceedings Volume Editor (1)

Conference Committee Involvement (3)
Optical Measurement and Nondestructive Testing: Techniques and Applications
8 November 2000 | Beijing, China
Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments
8 November 2000 | Beijing, China
Laser Interferometry X: Applications
2 August 2000 | San Diego, CA, United States
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top