CONFERENCE PROCEEDINGS
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Fanxing Li
at Chinese Academy of Sciences
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Author
Publications (4)
Proceedings Article | 6 February 2019 Paper
Double-beam laser interference lithography based on optical field modulation
Proceedings Volume 10842, 108421C (2019) https://doi.org/10.1117/12.2510947
KEYWORDS: Modulation, Lithography, Phase shift keying, Optics manufacturing, Laser applications, Wavefronts, Etching, Electron beam lithography, Laser development, Polarization
Proceedings Article | 30 January 2019 Paper
Lensless in-line holographic microscope resolution enhancement method from two intensity measurements based on data interpolation
Proceedings Volume 10841, 108410F (2019) https://doi.org/10.1117/12.2512106
KEYWORDS: Holograms, Image resolution, Resolution enhancement technologies, Digital holography, Holography, Phase retrieval, 3D image reconstruction, Absorption, Reconstruction algorithms, Image enhancement
Proceedings Article | 30 January 2019 Paper
Dynamic three-dimensional shape measurement based on light field imaging
Proceedings Volume 10841, 108410D (2019) https://doi.org/10.1117/12.2510920
KEYWORDS: 3D image processing, 3D metrology, Image processing, Optical testing, Imaging systems, Sensors, Cameras, 3D acquisition, Digital image processing, Calibration
Proceedings Article | 25 October 2016 Paper
Positioning control system of three-dimensional wafer stage of lithography
Proceedings Volume 9685, 96850T (2016) https://doi.org/10.1117/12.2244874
KEYWORDS: Lithography, Control systems, Semiconducting wafers, Clocks, Photomasks, Process control, Stepper motor drivers, Data communications, Telecommunications, Camera shutters
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