Dr. Farzin Mirzaagha
Applications Development Manager at KLA Corp
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 25 October 2007 Paper
Proc. SPIE. 6730, Photomask Technology 2007
KEYWORDS: Inspection, Reticles, Databases, Defect detection, SRAF, 3D modeling, Data modeling, Logic, Image transmission, Optical proximity correction

Proceedings Article | 20 October 2006 Paper
Proc. SPIE. 6349, Photomask Technology 2006
KEYWORDS: Inspection, Reticles, Semiconducting wafers, Photomasks, Wafer inspection, Metals, Defect inspection, Lithography, Image transmission, Visualization

Proceedings Article | 4 November 2005 Paper
Proc. SPIE. 5992, 25th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Photomasks, Sensors, Inspection, Lithography, Semiconducting wafers, Defect inspection, Defect detection, Crystals, Detector development, Deep ultraviolet

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top