Mr. Fedor A. Sidorov Profile

Fedor A. Sidorov

at Institute of Physical Technology

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 15 March 2019 Paper

A. Rogozhin, F. Sidorov, M. Bruk, E. Zhikharev

Proceedings Volume 11022, 110221O (2019) https://doi.org/10.1117/12.2522458

KEYWORDS: Electron beam lithography, Polymethylmethacrylate, Dry etching, Monte Carlo methods, Scattering, Chemical species, Ionization, Polymers

Proceedings Article | 30 December 2016 Paper

F. Sidorov, A. Molchanova, A. Rogozhin

Proceedings Volume 10224, 1022402 (2016) https://doi.org/10.1117/12.2266784

KEYWORDS: Dielectrics, Hybrid fiber optics, Oxides, Silicon, Interfaces, Capacitance, Praseodymium, Molybdenum, Hafnium, Transistors

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