Dr. Fei Liu
Optical Design Engineer at KLA-Tencor Corp
SPIE Involvement:
Author | Leadership Workshop Facilitator
Area of Expertise:
optical testing , optical metrology , image processing , optical design , optical fabrication
Publications (3)

SPIE Journal Paper | 1 April 2011
OE, Vol. 50, Issue 04, 043609, (April 2011) https://doi.org/10.1117/12.10.1117/1.3569692
KEYWORDS: Surface finishing, Monochromatic aberrations, Optical testing, Analytical research, Zernike polynomials, Metrology, Polishing, Interferometers, Optical engineering, Wavefronts

SPIE Journal Paper | 1 May 2010
OE, Vol. 49, Issue 05, 053002, (May 2010) https://doi.org/10.1117/12.10.1117/1.3421652
KEYWORDS: Polishing, Surface finishing, Interferometry, Geometrical optics, Ray tracing, Optical engineering, Optics manufacturing, Wavefronts, Commercial off the shelf technology, Monochromatic aberrations

SPIE Journal Paper | 1 November 2008
OE, Vol. 47, Issue 11, 113602, (November 2008) https://doi.org/10.1117/12.10.1117/1.3026107
KEYWORDS: Mirrors, Spectroscopy, Prisms, Lamps, Optical engineering, Photographic lenses, Sensors, Visible radiation, Collimators, Power meters

Conference Committee Involvement (2)
2004 SPIE
8 September 2004 |
2004
8 September 2004 |
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