Felix Ströer
at Technische Univ Kaiserslautern
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 21 June 2019 Presentation + Paper
Proc. SPIE. 11056, Optical Measurement Systems for Industrial Inspection XI
KEYWORDS: Lithography, Metrology, Calibration, Manufacturing, Spatial resolution, Sensor technology, Standards development

Proceedings Article | 7 September 2018 Paper
Proc. SPIE. 10834, Speckle 2018: VII International Conference on Speckle Metrology
KEYWORDS: Confocal microscopy, Holograms, Digital holography, Interferometers, Sensors, Surface roughness, Deconvolution

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