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Fengling You

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Proceedings Article | 28 January 2009 Paper

A new five degree-of-freedom measurement method and system

Fengling You, Qibo Feng, Bin Zhang

Proceedings Volume 7156, 715634 (2009) https://doi.org/10.1117/12.811951

KEYWORDS: Prisms, Sensors, Error analysis, Laser systems engineering, Beam splitters, Mirrors, Laser sources, Retroreflectors, Head, Collimation

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In this paper, a newly developed system for simultaneously measuring five-degree-of-freedom errors of machine tools is introduced. A single-mode fiber-coupled laser module is used to eliminate the beam drift of the laser source. Only a cube corner retro-reflector and a beam splitter are adopted in the moving target in order to sense the straightness errors and angle errors (pitch and yaw) respectively and simultaneously. A special prism (including a beam-splitter facet and an all-reflecting facet) was adopted to measure the roll. A simple common-path compensation method for laser beam drift is put forward, and a 2D position-sensitive detector and a lens are used to monitor angular drift of the laser beam. It is convenient to measure the parameters of the numerical control machine in workshop due to non-cable connecting between moving target and measurement head. The error analysis and theory analysis of roll which provide potent theoretical guidance in the future are given in detail.

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