Mr. Fengnien Tsai Profile

Fengnien Tsai

at Macronix International Co Ltd

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Author

Publications (2)

Proceedings Article | 19 March 2015 Paper

CD uniformity improvement of dense contact array in negative tone development process

Fengnien Tsai, Teng-hao Yeh, C. Yang, Elvis Yang, T. Yang, K. C. Chen

Proceedings Volume 9424, 94242J (2015) https://doi.org/10.1117/12.2083674

KEYWORDS: SRAF, Reticles, Critical dimension metrology, Photomasks, Lithography, Array processing, Imaging arrays, Semiconducting wafers, Optical lithography, Modulation

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Proceedings Article | 19 March 2012 Paper

Post-developed defect in word-line SADP process

P. Cheng, F. Tsai, C. Yang, Elvis Yang, T. Yang, K. Chen, Chih-Yuan Lu

Proceedings Volume 8325, 83252J (2012) https://doi.org/10.1117/12.914766

KEYWORDS: Distortion, Semiconducting wafers, Photomasks, Satellites, Etching, Polymers, Lithography, Photoresist processing, Defect inspection, Double patterning technology

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