Prof. Ferran Laguarta
at Univ Politècnica de Catalunya
SPIE Involvement:
Author
Publications (15)

Proceedings Article | 26 June 2017 Paper
Proceedings Volume 10334, 103340C (2017) https://doi.org/10.1117/12.2275614
KEYWORDS: Line scan image sensors, Cameras, Binary data, Objectives, Optical inspection, Defect detection, Inspection, Image classification, Visualization, Microscopy, Image visualization, Process control

Proceedings Article | 20 February 2017 Paper
Proceedings Volume 10110, 1011007 (2017) https://doi.org/10.1117/12.2249614
KEYWORDS: Inspection, Coating, Optical inspection, 3D metrology, Reflectance spectroscopy, Microscopy, Metrology, 3D image processing, Cameras, Confocal microscopy, Interfaces, Microscopes, Interferometry, Objectives

Proceedings Article | 22 September 2011 Paper
Proceedings Volume 8169, 81690V (2011) https://doi.org/10.1117/12.896724
KEYWORDS: Confocal microscopy, Freeform optics, Aspheric lenses, Metrology, Calibration, Sensors, Spherical lenses, Optics manufacturing, 3D metrology, Error analysis

Proceedings Article | 18 June 2007 Paper
Proceedings Volume 6616, 66161Z (2007) https://doi.org/10.1117/12.726187
KEYWORDS: Confocal microscopy, Semiconducting wafers, Thin films, Silicon, Objectives, Interfaces, Refractive index, Blue light emitting diodes, Light sources, Profiling

Proceedings Article | 10 September 2004 Paper
Proceedings Volume 5457, (2004) https://doi.org/10.1117/12.545701
KEYWORDS: Confocal microscopy, Interferometers, Objectives, Head, 3D metrology, Profiling, Sensors, Microscopes, Inspection, Standards development

Showing 5 of 15 publications
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