Dr. Florian Delachat
at CEA-LETI
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 26 March 2019 Paper
Proc. SPIE. 10958, Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019
KEYWORDS: Thin films, Etching, Ultraviolet radiation, Silicon, Coating, Nanoimprint lithography, Semiconducting wafers, Adhesives

Proceedings Article | 19 September 2018 Paper
Proc. SPIE. 10775, 34th European Mask and Lithography Conference
KEYWORDS: Lithography, Data modeling, Calibration, Silicon, Coating, Manufacturing, Scanning electron microscopy, Nanoimprint lithography, Critical dimension metrology, Semiconducting wafers

Proceedings Article | 20 March 2018 Presentation + Paper
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Metrology, Data modeling, Silicon, Coating, Manufacturing, Scanning electron microscopy, Nanoimprint lithography, Critical dimension metrology, Photoresist processing, Semiconducting wafers

Proceedings Article | 19 March 2018 Presentation
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Optical lithography, 3D acquisition, Scattering, Etching, X-rays, 3D modeling, Directed self assembly, Integrated circuits

Proceedings Article | 19 March 2018 Presentation
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Semiconductors, Oxides, Optical lithography, Silicon, Materials processing, Photomasks, Directed self assembly, Critical dimension metrology, Photoresist processing, Semiconducting wafers

Showing 5 of 11 publications
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