The modern optical industry requires objects with complex topographical structures. Free-form shaped objects are of large interest in many branches, especially for size reduced, modern lifestyle products like digital cameras. State of the art multi-axes-coordinate measurement machines (CMM), like the topographical measurement machine TII-3D, are by principle suitable to measure free-form shaped objects. The only limitation is the software package. This paper may illustrate a simple way to enhance coordinate measurement machines in order to add a free-form function. Next to a coordinate measurement machine, only a state of the art CAD† system and a simple piece of software are necessary. For this paper, the CAD software CREO‡ had been used. CREO enables the user to develop a 3D object in two different ways. With the first method, the user might design the shape by drawing one or more 2D sketches and put an envelope around. Using the second method, the user could define one or more formulas in the editor to describe the favoured surface. Both procedures lead to the required three-dimensional shape. However, further features of CREO enable the user to export the XYZ-coordinates of the created surface. A special designed software tool, developed with Matlab§, converts the XYZ-file into a measurement matrix which can be used as a reference file. Finally the result of the free-form measurement, carried out with a CMM, has to be loaded into the software tool and both files will be computed. The result is an error profile which provides the deviation between the measurement and the target-geometry.
KEYWORDS: 3D metrology, Photovoltaics, Time metrology, Data analysis, Interferometers, Applied sciences, Sensors, Optical tracking, Matrices, Algorithm development
Together with the group of interferometry based systems, coordinate measurement machines are an essential part of the
metrology in the modern optical industry.
Coordinate measurement machines commonly consist of a multi axes framework. They are designed to operate in a
defined three dimensional work zone, where every possible point can be reached by the measurement tool tip. This basic
design principle leads to some interdependent challenges. A detailed measurement result needs a large amount of
measurement points to detect even minor irregularities and short-wave errors. However, a rising of the amount of
measurement points increases the corresponding measurement time analogous. On the other hand, the extended operation
time increases the access of undesired thermal and dynamic influences, which cause multiple errors to the measurement
result. Furthermore, modern production processes need rapid metrology systems to aid the machining time.
This paper discusses results obtained by operating with three different measurements in order to find an agreement
between speed and certainty of the coordinate measurement machine. The topographic coordinate measurement system TII-
3D had been re-developed at the University of Applied Sciences Deggendorf in the laboratory of optical Engineering and it
is equipped with three different measurement strategies. The first mode, the Track-Mode operates in concentric circles on
top of the surface of the object to be measured. The Spiral-Mode measures along a dynamic moveable spiral line and the
Section-Mode produces multiple cross-sections.
In the field of precision optics the interferometry is the most applied measurement method to test spherical and flat
objects. In principle, a standard interferometer setup is limited to these surface geometries, but interferometric systems
may be modified with the aid of CGH’s or the stitching technology. As a consequence aspherical shapes and even
freeform optics are measurable up to a certain extent. In an interferometric measurement the measured variable is the
optical path difference (OPD) between the reference wave and the test wave. Based on the detected OPD the surface
error of the test object is calculated by phase shifting methods for instance. It is evident, that the error from the reference
surface affects the determination of the test object surface error. One option to face this problem is the calibration of the
system prior to the measurement. For this the determination of the reference surface error may be realized with the aid of
a two sphere test or a random ball test e.g. [1]. In the well-known SSI-technology from QED technologies the reference
surface error is calculated on the basis of the sub-measurements. Due to the self-calibrating nature of the QED stitching
principle [2-4] a calibration of the system prior to the measurement is not necessary. The University of Applied Sciences
Deggendorf has implemented a similar algorithm to estimate the reference wave front error, or to be exact the error of
the whole optical system, based on a multiple set of sub-measurements. This paper describes the applied algorithm in
detail and discusses the results. To verify the implemented tool the results are compared to the outcomes of the QED
stitching software.
The usage of stitching technologies in the interferometrical precision optics measurement technique becomes more and
more popular. There exist already a few metrology stages providing the stitching principle, such as, for example, the well
known Sub-Aperture Stitching Interferometer for Aspheres (SSI-A1) [1] [2] [3] from QED technologies. For
measurements with the SSI-A the greatest measurable diameter of the test object is approximately 280 mm [1]. As a
consequence the University of Applied Sciences Deggendorf develops an own measuring system in order to test large
telescope mirrors with a diameter of more than one meter which should be ready for application in 2012. The expected
positioning accuracy of the measuring patches is significantly lower in comparison with the high-accurate SSI-A.
Therefore a cross-correlation based translation detection tool is implemented in our current software solution. Since the
metrology system is currently being established the SSI-A and the μPhase2 interferometer from TRIOPTICS are used as
input data sources for the software development. Further this paper discusses the robustness of the translation detection
tool and presents a stabilisation method of the stitching result with the aid of physical markers.
We present a synthesized sub-ps dual-wavelength laser source for digital holographic interferometry with a wide
reconstruction range. The developed laser source generates two spectrally separated parts within one pulse. The sub-ps
pulse duration desensitizes the holographic setup to environmental impacts. A center wavelength distance of only 12 nm
with a high contrast was demonstrated by spectral shaping of the 50 nm broad seed spectrum of a CPA Ti:sapphire laser
system centered at 800 nm.
Time-resolved two-wavelength contouring requires the simultaneous and separable recording of two holograms. In
general, a single CCD-camera is applied, and the spectral separation is realized by different reference wave tilts, which
requires ambitious interferometric setups. Contrary to this, we introduce two CCD-cameras for digital holographic
recording, thus essentially simplifying the interferometric setup by the need of only one propagation direction of the
reference wave. To separate the holograms for the simultaneous recording process, a Mach-Zehnder interferometer was
extended by a polarization encoding sequence.
To study our approach of time-resolved digital holographic two-wavelength contouring, an adaptive fluidic PDMS-lens
with integrated piezoelectric actuator served as test object. The PDMS-lens consists of an oil-filled lens chamber and a
pump actuator. If a voltage is applied to the piezoelectric bending actuator the fluid is pumped into the lens chamber
which causes a curvature change of the 60-μm thick lens membrane and thus a shift of the focal length. The dynamic
behavior of the PDMS-lens, driven at a frequency of 1 Hz, was investigated at a frame rate of 410 frames per second.
The measured temporal change of the lens focal length between 98 and 44 mm followed the modulation of the
piezoelectric voltage with a 30 V peak-to-peak amplitude. Due to the performed time-resolved two wavelength
contouring, we are able to extract the optical path length differences between center and perimeter of the lens. From the
calculated phase difference maps we estimated large optical path differences of larger than 10 μm, corresponding to
more than 15 times of the source wavelength.
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