Mr. Fook Loong Chin Profile

Fook Loong Chin

OPC Solutions Engineer at Spansion Inc

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Publications (2)

Proceedings Article | 16 March 2009 Paper

Chemically amplified resist modeling in OPC

Xin Zheng, Jason Huang, Fred Kuo, Aram Kazarian, Fook Chin, Yongfa Fan

Proceedings Volume 7274, 727435 (2009) https://doi.org/10.1117/12.814354

KEYWORDS: Optical proximity correction, Chemically amplified resists, Calibration, Data modeling, Diffusion, Semiconducting wafers, Image enhancement, Optical resolution, Optical lithography, Image analysis

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Proceedings Article | 7 March 2008 Paper

Understanding and application of constructive, destructive SRAF

Fook Chin, Todd Lukanc

Proceedings Volume 6924, 69242V (2008) https://doi.org/10.1117/12.773049

KEYWORDS: SRAF, Image processing, Lithography, Optical lithography, Photomasks, Atrial fibrillation, Error analysis, Manufacturing, Optical proximity correction, Electroluminescence

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