Dr. Francesca Perissinotti Profile

Dr. Francesca Perissinotti

Process Engineer at DNP Photomask Europe

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Publications (2)

Proceedings Article | 23 September 2009 Paper

Back-glass cleaning: reducing repelliclization costs by focused action

Francesca Perissinotti, Luca Sartelli, Hiroyuki Miyashita, Ming-Chien Chiu, Yu-Chang Liu, Hung-Chieh Chung, Frank Sundermann, Stuart Gough, Sonia Tourniol, Felix Dufaye

Proceedings Volume 7488, 74882M (2009) https://doi.org/10.1117/12.830718

KEYWORDS: Photomasks, Pellicles, Inspection, Contamination, Reticles, Ions, Glasses, Air contamination, Particles, Chromium

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Proceedings Article | 30 October 2007 Paper

Full sulfate-free process: joint achievement of minimal residual ions and yield improvement

Francesca Perissinotti, Luca Sartelli, Davide Cassago, Hiroyuki Miyashita

Proceedings Volume 6730, 67301F (2007) https://doi.org/10.1117/12.746653

KEYWORDS: Ultraviolet radiation, Ions, Contamination, Inspection, Photomasks, Transmittance, Ozone, Air contamination, Photoresist processing, Quartz

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