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Francois Batllo
at Entegris, Inc.
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Publications (1)
Proceedings Article | 14 May 2007 Paper
Chemical mechanical planarization for high precision optics
Francois Batllo, Kevin Moeggenborg, Stan Lesiak, Roman Salij
Proceedings Volume 10316, 1031609 (2007) https://doi.org/10.1117/12.722153
KEYWORDS: Chemical mechanical planarization, Polishing, Surface finishing, Aluminum, Mirrors, Optics manufacturing, Abrasives, Metals, Oxides, Semiconducting wafers
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