Frank Flohrer
at JENOPTIK Optical Systems GmbH
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 11 February 2011 Paper
Proc. SPIE. 7914, Fiber Lasers VIII: Technology, Systems, and Applications
KEYWORDS: Optical fibers, Refractive index, Cladding, Glasses, Single mode fibers, Fiber lasers, Ytterbium, Aluminum, Phosphorus, Absorption

Proceedings Article | 20 September 2004 Paper
Proc. SPIE. 5448, High-Power Laser Ablation V
KEYWORDS: Mirrors, Reflectivity, Xenon, Solids, Extreme ultraviolet, Extreme ultraviolet lithography, High volume manufacturing, Optics manufacturing, Plasma, Tin

Proceedings Article | 20 May 2004 Paper
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Mirrors, Metals, Reflectivity, Xenon, Extreme ultraviolet, Extreme ultraviolet lithography, High volume manufacturing, EUV optics, Plasma, Tin

Proceedings Article | 16 June 2003 Paper
Proc. SPIE. 5037, Emerging Lithographic Technologies VII
KEYWORDS: Lithography, Optical filters, Plasmas, Reflectivity, Xenon, Solids, Gas lasers, Extreme ultraviolet, Extreme ultraviolet lithography, EUV optics

Proceedings Article | 1 July 2002 Paper
Proc. SPIE. 4688, Emerging Lithographic Technologies VI
KEYWORDS: Lithography, Optical filters, Calibration, Xenon, Solids, Extreme ultraviolet, Extreme ultraviolet lithography, Plasma generation, Plasma, Liquids

Showing 5 of 6 publications
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