Dr. Frank Frost
at Leibniz-Institut fuer Oberflaechenmodifizierung eV
SPIE Involvement:
Publications (10)

SPIE Journal Paper | 31 March 2020
OE Vol. 59 Issue 03
KEYWORDS: Aluminum, Etching, Ion beams, Oxygen, Ions, Reactive ion etching, Oxides, Optics manufacturing, Atomic force microscopy, Spatial frequencies

SPIE Journal Paper | 22 January 2020
JATIS Vol. 6 Issue 01
KEYWORDS: Aluminum, Etching, Photoresist materials, Ion beams, Atomic force microscopy, Oxygen, Spatial frequencies, Surface roughness, Silicon, Nitrogen

SPIE Journal Paper | 24 May 2019
OE Vol. 58 Issue 09
KEYWORDS: Etching, Diffraction gratings, Ions, Diffraction, Ion beams, Reactive ion etching, Refractive index, Photoresist materials, Silica, Oxygen

SPIE Journal Paper | 20 May 2019
OE Vol. 58 Issue 09
KEYWORDS: Ion beams, Aluminum, Etching, Polymers, Ions, Polymer thin films, Surface finishing, Metal optics, Surface roughness, Mirrors

Proceedings Article | 26 April 2019 Paper
Proc. SPIE. 11032, EUV and X-ray Optics: Synergy between Laboratory and Space VI
KEYWORDS: Spatial frequencies, Etching, Ions, Surface roughness, Oxygen, Ion beams, Aluminum, Optics manufacturing

Showing 5 of 10 publications
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