Dr. Frank Siewert
at Helmholtz-Zentrum Berlin
SPIE Involvement:
Conference Program Committee | Author
Publications (31)

Proceedings Article | 22 February 2021 Presentation
Proc. SPIE. 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV
KEYWORDS: Nanostructures, X-ray optics, Metrology, Statistical analysis, X-rays, Reflectivity, Nondestructive evaluation, Machine learning, Semiconducting wafers, X-ray fluorescence spectroscopy

Proceedings Article | 2 October 2019 Presentation + Paper
Proc. SPIE. 11109, Advances in Metrology for X-Ray and EUV Optics VIII
KEYWORDS: Mirrors, X-ray optics, Metrology, Sensors, Calibration, Error analysis, X-rays, Autocollimators, Profilometers, Precision calibration

Proceedings Article | 9 September 2019 Paper
Proc. SPIE. 11109, Advances in Metrology for X-Ray and EUV Optics VIII
KEYWORDS: Point spread functions, Mirrors, X-ray optics, Metrology, Spatial frequencies, Sensors, Calibration, Beam shaping, Spatial resolution

Proceedings Article | 9 September 2019 Paper
Proc. SPIE. 11109, Advances in Metrology for X-Ray and EUV Optics VIII
KEYWORDS: Mirrors, Beam splitters, Reticles, Metrology, Calibration, CCD cameras, Autocollimators, Distance measurement, Objectives, Charge-coupled devices

Proceedings Article | 9 September 2019 Presentation + Paper
Proc. SPIE. 11109, Advances in Metrology for X-Ray and EUV Optics VIII
KEYWORDS: Mirrors, Nano opto mechanical systems, Photons, Deflectometry, Ion beams, Ray tracing, Synchrotrons, Spatial resolution, Optics manufacturing, Ion beam finishing

Showing 5 of 31 publications
Conference Committee Involvement (9)
EUV and X-ray Optics, Sources, and Instrumentation
19 April 2021 | Online Only, Czech Republic
Advances in Metrology for X-Ray and EUV Optics IX
24 August 2020 | Online Only, California, United States
Advances in Metrology for X-Ray and EUV Optics VIII
11 August 2019 | San Diego, California, United States
Advances in Metrology for X-Ray and EUV Optics VII
6 August 2017 | San Diego, California, United States
Advances in Metrology for X-Ray and EUV Optics VI
29 August 2016 | San Diego, California, United States
Showing 5 of 9 Conference Committees
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