Dr. Franklin C. Wong Profile

Dr. Franklin C. Wong

at ASML

SPIE Involvement:

Author

Publications (7)

Proceedings Article | 22 February 2021 Presentation + Paper

Ellipsometric critical dimension metrology employing mid-infrared wavelengths for high-aspect-ratio channel hole module etch processes

G. Andrew Antonelli, Nick Keller, Troy Ribaudo, Franklin Wong, Wenmei Ming, Hepeng Ding, Zhuo Chen, Ross Grynko, Ahmad Fumani, Zhuan Liu, Sadao Takabayashi, John Hauck, Joshua Frederick, Dan Engelhard, Bo Hui Ng, Biow Hiem Ong, Luey Chwan Liong

Proceedings Volume 11611, 116111O (2021) https://doi.org/10.1117/12.2583786

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Proceedings Article | 22 February 2021 Presentation + Paper

Methods to overcome limited labeled data sets in machine learning-based optical critical dimension metrology

Franklin Wong, Yudong Hao, Wenmei Ming, Petar Žuvela, Peifen Teh, Jingsheng Shi, Jie Li

Proceedings Volume 11611, 116111P (2021) https://doi.org/10.1117/12.2583774

KEYWORDS: Metrology, Machine learning, Signal processing, Semiconductors, Data modeling, Time metrology, Data processing

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Proceedings Article | 22 February 2021 Presentation + Paper

X-ray critical dimension metrology solution for high aspect ratio semiconductor structures

Matthew Wormington, Adam Ginsburg, Israel Reichental, Alex Dikopoltsev, Alex Krokhmal, Yuri Vinshtein, Paul Ryan, Rahul Korlahalli, Franklin Wong, Silvio Rabello, Yang Song, Jie Li

Proceedings Volume 11611, 116110W (2021) https://doi.org/10.1117/12.2583966

KEYWORDS: X-rays, Semiconductors, Critical dimension metrology, Semiconducting wafers, Metrology, X-ray characterization, Scattering, Etching, Capacitors, 3D metrology

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Proceedings Article | 4 September 2008 Paper

Hybrid magnetic tunnel junction/ spin filter device

Yuri Suzuki, Brittany Nelson-Cheeseman, Franklin Wong, Rajesh Chopdekar, Elke Arenholz

Proceedings Volume 7036, 70360U (2008) https://doi.org/10.1117/12.797406

KEYWORDS: Magnetism, Interfaces, X-ray magnetic circular dichroism, Electrodes, Manganese, Spinel, Iron, Heterojunctions, Switching, Magnons

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Proceedings Article | 6 April 2006 Paper

Shape memory alloy micro-actuator performance prediction using a hybrid constitutive model

Franklin Wong, Olivier Boissonneault

Proceedings Volume 6170, 61700V (2006) https://doi.org/10.1117/12.657440

KEYWORDS: Shape memory alloys, Actuators, Atrial fibrillation, Control systems, Systems modeling, Modeling, Temperature metrology, Motion models, Protactinium, Electroluminescence

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Proceedings Article | 31 May 2005 Paper

Enhancement of YBCO microbolometer performances with regionally thinned microbridges

Philippe Merel, Philips Laou, Franklin Wong

Proceedings Volume 5783, (2005) https://doi.org/10.1117/12.603810

KEYWORDS: Microbolometers, Silicon, Silicon films, Thin films, Bolometers, Gold, Sputter deposition, Signal to noise ratio, Resistance, Modulation

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Proceedings Article | 16 May 2005 Paper

Hybrid micro-macro-mechanical constitutive model for shape-memory alloys

Franklin Wong, Olivier Boissonneault, Patrick Terriault

Proceedings Volume 5761, (2005) https://doi.org/10.1117/12.598739

KEYWORDS: Shape memory alloys, Atrial fibrillation, Systems modeling, Control systems, Electroluminescence, Protactinium, Aerospace engineering, Solids, Resistance, Mechanics

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Showing 5 of 7 publications

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