Dr. Fred Lewis Terry Profile

Dr. Fred Lewis Terry

at Univ of Michigan

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Publications (15)

Proceedings Article | 21 February 2020 Paper

Stand-off non-destructive determination of protein level in wheat flour with a super-continuum laser

Kaiwen Guo, Tianqu Zhai, Brandon Demory, Shawn Meah, Ramon Martinez, Mohammed Islam, Fred Terry, Robert Maynard

Proceedings Volume 11234, 112340W (2020) https://doi.org/10.1117/12.2550400

KEYWORDS: Signal to noise ratio, Light sources, Reflectivity, Spectroscopy, Near infrared, Nondestructive evaluation, Fiber lasers, Absorption

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Proceedings Article | 21 February 2020 Paper

Scattering spectra from trace particles actively illuminated by a mid-infrared supercontinuum FTIR sensor

Ramon Martinez, Kaiwen Guo, Fred Terry, Tianqu Zhai, Mohammed Islam, Agustin Ifarraguerri

Proceedings Volume 11234, 112340V (2020) https://doi.org/10.1117/12.2550334

KEYWORDS: Particles, Scattering, FT-IR spectroscopy, Sensors, Mid-IR, Reflectivity

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Proceedings Article | 7 March 2019 Presentation + Paper

Stand-off FTIR spectroscopy utilizing a long-wave infrared supercontinuum source

Ramon Martinez, Kaiwen Guo, Tianqu Zhai, Fred Terry, Mohammed Islam, Lukasz Maksymiuk, Robert Maynard, Michael Freeman, Carl DeWilde, Agustin Ifarraguerri

Proceedings Volume 10897, 108971Q (2019) https://doi.org/10.1117/12.2513908

KEYWORDS: Particles, Sensors, FT-IR spectroscopy, Spectroscopy, Scattering, Infrared spectroscopy, Chemical analysis, Long wavelength infrared

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Proceedings Article | 7 March 2019 Presentation + Paper

High-power all-fiber-integrated super-continuum source from 1.57 to 12 microns

Mohammed Islam, Carl DeWilde, Lukasz Maksymiuk, Michael Freeman, Kaiwen Guo, Ramon Martinez, Robert Maynard, Shawn Meah, Brandon Demory, Tianqu Zhai, Fred Terry

Proceedings Volume 10897, 108970S (2019) https://doi.org/10.1117/12.2513974

KEYWORDS: Long wavelength infrared, Prototyping, ZBLAN, Mid-IR, Glasses, Fiber lasers, Chalcogenides, Optical fibers, Fiber amplifiers, Semiconductor lasers

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Proceedings Article | 7 March 2019 Presentation + Paper

Non-destructive detection of acrylamide in potato fries with high-power supercontinuum lasers

Kaiwen Guo, Brandon Demory, Shawn Meah, Tianqu Zhai, Ramon Martinez, Mohammed Islam, Lukaz Maksymiuk, Fred Terry, Carl DeWilde, Michael Freeman, Luju Ren, Luis Rodriguez-Saona

Proceedings Volume 10897, 108971S (2019) https://doi.org/10.1117/12.2514326

KEYWORDS: Absorption, Near infrared, Spectroscopy, High power lasers, Nondestructive evaluation, Near infrared spectroscopy, Laser applications, Standoff detection, Supercontinuum sources

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SPIE Journal Paper | 1 November 2011

Surface roughness measurement of flat and curved machined metal parts using a near infrared super-continuum laser

Vinay Alexander, Mohammed Islam, Fred Terry, Huaqiu Deng, Raymond Pittman, Thomas Valen

OE, Vol. 50, Issue 11, 113602, (November 2011) https://doi.org/10.1117/12.10.1117/1.3644549

KEYWORDS: Reflectivity, Surface roughness, Metals, Polishing, Gold, Near infrared, Mirrors, Profilometers, Scattering, Light scattering

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SPIE Journal Paper | 1 December 2010

Optical probe for porosity defect detection on inner diameter surfaces of machined bores

Ojas Kulkarni, Mohammed Islam, Fred Terry

OE, Vol. 49, Issue 12, 123606, (December 2010) https://doi.org/10.1117/12.10.1117/1.3526336

KEYWORDS: Metals, Scattering, Defect detection, Inspection, Light scattering, Sensors, Laser scattering, Manufacturing, GRIN lenses, Surface finishing

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Proceedings Article | 19 February 2009 Paper

Mid-IR super-continuum generation

Mohammed Islam, Chenan Xia, Mike Freeman, Jeremiah Mauricio, Andy Zakel, Kevin Ke, Zhao Xu, Fred Terry

Proceedings Volume 7195, 71950W (2009) https://doi.org/10.1117/12.807206

KEYWORDS: Modulation, Optical amplifiers, Mid-IR, Fiber amplifiers, ZBLAN, Absorption, Semiconductor lasers, Single mode fibers, Laser ablation, Diodes

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Proceedings Article | 10 May 2005 Paper

Immersion scatterometry for improved feature resolution and high speed acquisition of resist profiles

Fred Terry, Joseph Bendik

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.599135

KEYWORDS: Scatterometry, Data modeling, Computer simulations, Photoresist materials, Refractive index, Water, Spectroscopic ellipsometry, Reflectometry, Photoresist developing, Reflectance spectroscopy

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Proceedings Article | 2 June 2003 Paper

Accuracy limitations in specular-mode optical topography extraction

Fred Terry

Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.488484

KEYWORDS: Data modeling, Photoresist materials, Diffraction gratings, Spectroscopic ellipsometry, Silicon, In situ metrology, Scanning electron microscopy, Scatterometry, Scattering, Refractive index

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Proceedings Article | 23 September 2002 Paper

Diode laser sensor to monitor HCL in a plasma etch reactor

Suhong Kim, Pete Klimecky, Shang-I Chou, Jay Jeffries, Fred Terry, Ronald Hanson

Proceedings Volume 4817, (2002) https://doi.org/10.1117/12.452073

KEYWORDS: Etching, Plasma, Plasma etching, Sensors, Chlorine, Semiconductor lasers, Absorption, Modulation, Anisotropic etching, Semiconducting wafers

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Proceedings Article | 23 April 1999 Paper

In-situ UV absorption CF2 sensor for reactive ion etch process control

Hunsuk Kim, Fred Terry

Proceedings Volume 3742, (1999) https://doi.org/10.1117/12.346237

KEYWORDS: Etching, Absorption, Sensors, Fluorine, Plasma, Reactive ion etching, Statistical analysis, Ultraviolet radiation, Data modeling, Ions

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Proceedings Article | 15 February 1994 Paper

Real-time feedback control of reactive ion etching

Michael Elta, J. Fournier, James Freudenberg, M. Giles, Jessy Grizzle, Pramod Khargonekar, Brian Rashap, Fred Terry, T. Vincent

Proceedings Volume 2091, (1994) https://doi.org/10.1117/12.167364

KEYWORDS: Fluorine, Etching, Reactive ion etching, Plasma, Feedback control, Actuators, Semiconducting wafers, Ions, Control systems, Device simulation

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Proceedings Article | 4 August 1993 Paper

Utilizing diffraction imaging for nondestructive wafer topography measurements

Tim Morris, Dennis Grimard, Chiao-Fe Shu, Fred Terry, Michael Elta, Ramesh Jain

Proceedings Volume 1926, (1993) https://doi.org/10.1117/12.148964

KEYWORDS: Diffraction, Diffraction gratings, Semiconducting wafers, Image processing, Scanning electron microscopy, Signal processing, Quantization, Etching, Semiconductors, Time metrology

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Proceedings Article | 1 March 1991 Paper

Theoretical and practical aspects of real-time Fourier imaging

Dennis Grimard, Fred Terry, Michael Elta

Proceedings Volume 1392, (1991) https://doi.org/10.1117/12.48946

KEYWORDS: Diffraction, Semiconducting wafers, Fourier transforms, Integrated circuits, Semiconductors, Real time imaging, Semiconductor manufacturing, Imaging systems, Manufacturing, Far-field diffraction

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Showing 5 of 15 publications

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