Fredric Ihren
at Mycronic AB
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 12 December 2023 Presentation + Paper
Christopher Leavitt, Michael Hunsweck, Florence Eschbach, Yang Liu, Kyle Vogt, Jun Kim, Andrew Sowers, Frank Abboud, Mikael Wahlsten, Robert Eklund, Mats Rosling, Peter Henriksson, Anders Svensson, Fredric Ihren, Youngjin Park
Proceedings Volume PC12751, PC127510T (2023) https://doi.org/10.1117/12.2688097
KEYWORDS: EUV optics, Laser applications, Extreme ultraviolet, Laser development, Critical dimension metrology, Sustainability, Solid state lasers, Solid state electronics, Printing, Power consumption

Proceedings Article | 22 November 2023 Presentation
Robert Eklund, Mikael Wahlsten, Mats Rosling, Martin Glimtoft, Peter Henriksson, Anders Svensson, Fredric Ihren, Youngjin Park
Proceedings Volume PC12751, PC127510H (2023) https://doi.org/10.1117/12.2687582
KEYWORDS: Laser development, Sustainability, Semiconductors, Semiconductor manufacturing, Manufacturing, Laser marking, Carbon

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