CONFERENCE PROCEEDINGS
Advanced Search
Dr. Gang Li
at Xiamen Univ
SPIE Involvement:
Author
Publications (4)
Proceedings Article | 4 January 2008 Paper
Charge accumulation in composite dielectric layers in capacitive RF MEMS switches
Proceedings Volume 6836, 68360Z (2008) https://doi.org/10.1117/12.756133
KEYWORDS: Dielectrics, Composites, Microelectromechanical systems, Switches, Silicon, Silica, Plasma enhanced chemical vapor deposition, Capacitance, Silicon films, Metals
Proceedings Article | 4 January 2008 Paper
Investigation of charge accumulation in the dielectric for robust RF MEMS switches
Xuyuan Chen, Ulrik Hanke, Haisheng San, Gang Li, Linxian Zhan
Proceedings Volume 6836, 68360H (2008) https://doi.org/10.1117/12.757939
KEYWORDS: Dielectrics, Switches, Microelectromechanical systems, Metals, Bridges, Electrodes, Interfaces, Ions, Ion implantation, Silicon
Proceedings Article | 4 January 2008 Paper
Influence of ion implantation on dielectric charging in capacitive RF MEMS switches
Proceedings Volume 6836, 68360J (2008) https://doi.org/10.1117/12.756276
KEYWORDS: Dielectrics, Switches, Microelectromechanical systems, Ion implantation, Ions, Silicon, Silicon films, Capacitors, Low pressure chemical vapor deposition, Reliability
Proceedings Article | 4 January 2008 Paper
Actuation voltage wave-form dependence of charge accumulation in RF MEMS switches
Proceedings Volume 6836, 68360K (2008) https://doi.org/10.1117/12.756390
KEYWORDS: Switches, Dielectrics, Microelectromechanical systems, Bridges, Capacitors, Silicon, Metals, Reliability, Capacitance, Aluminum
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top