Dr. Gang Sun Profile

Dr. Gang Sun

Owner/Senior Technologist at SunOptical Systems LLC

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Publications (1)

Proceedings Article | 5 April 2007 Paper

High-throughput polarization imaging for defocus and dose inspection for production wafers

Gang Sun, Eugene Onoichenco, Yonghuang Fu, Yongqiang Liu, Ricardo Amell, Casey McCandless, Rajasekar Reddy, Gidesh Kumar, Max Guest

Proceedings Volume 6518, 65182M (2007) https://doi.org/10.1117/12.712381

KEYWORDS: Polarization, Inspection, Semiconducting wafers, Imaging systems, Reflection, Defect inspection, Ellipsometry, Scatterometry, Wafer inspection, Lithography

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