When applying phase-stepping interferometry to measure wavefront with aberration, distortion is
caused by various factors and the main one is phase-shifting error from phase shifter. In this paper,
the calculation theory and consequence in measurement error of the phase shift algorithm are
discussed. These algorithms include traditional three-phase algorithm, traditional four-phase
algorithm, traditional five-phase algorithm, carre algorithm, new compensating four-phase
algorithm and new compensating five-phase algorithm. According to the theory analysis and
computer stimulation, these methods are compared through introduce phase-shifting error,
wavefront aberration and Gauss noise, the results show the new compensating five-phase
algorithm is immune to phase-shifting error, and its result is insensitive to Gauss noise, it can
improve measurement accuracy effectively.
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