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Dr. Gaobin Xu
at Hefei Univ of Technology
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Publications (1)
Proceedings Article | 10 September 2002 Paper
New test structure for measuring thermal conductivity of polysilicon thin films
Gaobin Xu, Qing-An Huang, Yanfeng Jiang
Proceedings Volume 4928, (2002) https://doi.org/10.1117/12.483184
KEYWORDS: Thin films, Silicon, Silicon films, Surface micromachining, Micromachining, Polysomnography, Convection, Low pressure chemical vapor deposition, Temperature metrology, Thermal modeling
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